DocumentCode :
409444
Title :
An effective vision technique for microchip lead inspection
Author :
Mir-Nasiri, Nazim ; Al-Obaidy, H.H.L. ; Salami, Momoh J E ; Amin, Saurabh
Author_Institution :
Dept. of Mechatronics, IIU Malaysia, Kuala Lumpur, Malaysia
Volume :
1
fYear :
2003
fDate :
10-12 Dec. 2003
Firstpage :
135
Abstract :
A new effective method for the microchip lead inspection for the chip manufacturing industry has been developed in this work. In contrast to the gray scale pattern matching technique this approach employs selected parameters of binary blobs to perform fault detection and measurements. This leads to a significant reduction of image processing time. A special combination of gray level filtering techniques with gray morphological operations enhances the borders of the lead images. Newly developed threshold calibration technique significantly improves the measurement accuracy. A unique statistical analysis has been developed to identify all possible lead defects in the chips. This method is rotationally and scale invariant and able to detect defective leads for the chips with different specifications. The minimum required information about the microchip is the number of leads.
Keywords :
automatic optical inspection; calibration; fault location; image morphing; integrated circuit manufacture; statistical analysis; binary blobs; chip manufacturing industry; fault detection; gray level filtering techniques; gray morphological operations; image processing time; lead defects; microchip; microchip lead inspection; statistical analysis; threshold calibration technique; vision technique; Calibration; Fault detection; Filtering; Image processing; Inspection; Manufacturing industries; Morphological operations; Pattern matching; Performance evaluation; Semiconductor device measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Technology, 2003 IEEE International Conference on
Print_ISBN :
0-7803-7852-0
Type :
conf
DOI :
10.1109/ICIT.2003.1290256
Filename :
1290256
Link To Document :
بازگشت