Effects of ceramic thin film coating on friction surfaces for surface acoustic wave linear motor

Author

Nakamura, Yuta ; Kurosawa, Minoru Kuribayashi ; Shigematsu, Takashi ; Asai, Katsuhiko

Author_Institution

Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Yokohama, Japan

Volume

2

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

1766

Abstract

The effects of ceramic thin film coating on friction surfaces for surface acoustic wave (SAW) linear motor were estimated. By using a slider coated with SiC, the maximum no-load speed of the slider was approximately 1.1 m/s, which was equivalent to the horizontal vibration velocity of the Rayleigh wave at the driving voltage of 125 V_0-p. Furthermore, by using a slider coated with HA-DLC and a stator coated with Al₂O₃, the no-load speed and the output force of the slider were approximately 1.5 m/s and 3 N at 190 V_0-p. It was shown that the driving characteristics were improved by ceramic thin film coating with the proper materials such as SiC, HA-DLC and Al₂O₃ on friction surfaces.

Keywords

Rayleigh waves; ceramics; coatings; friction; surface acoustic wave devices; thin films; ultrasonic motors; Al₂O₃; HA-DLC; Rayleigh wave; SiC; ceramic thin film coating; coated slider; driving characteristics; friction surfaces; surface acoustic wave linear motor; vibration velocity; Acoustic waves; Ceramics; Coatings; Frequency; Friction; Silicon carbide; Stators; Surface acoustic wave devices; Surface acoustic waves; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293254

Filename

1293254