Tunable photonic-bandgap microcavity waveguides at 1.55 /spl mu/m

Author

Wong, Chee Wei ; Rakich, Peter T. ; Johnson, Steven G. ; Qi, Minghao ; Jeon, Yongbae ; Barbastathis, George ; Kim, Sang-Gook

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA, USA

fYear

2003

fDate

6-6 June 2003

Abstract

We have designed and fabricated tunable photonic-bandgap microcavities in optical waveguides, with strain modulation via thin-film piezoelectric actuators on deformable membranes. Cavity resonance tunability, with nanometer lattice control, is designed through perturbation on FDTD computations. Device fabrication integrates X-ray nanolithography, piezoelectric microactuators and bulk micromachining.

Keywords

X-rays; cavity resonators; finite difference time-domain analysis; microactuators; microcavities; micromachining; nanolithography; optical design techniques; optical fabrication; optical tuning; optical waveguides; perturbation theory; photonic band gap; piezoelectric actuators; thin film devices; 1.55 micron; FDTD computation; X-ray nanolithography; bulk micromachining; cavity resonance tunability; deformable membrane; nanometer lattice control design; optical waveguides; perturbation; piezoelectric microactuators; strain modulation; thin-film piezoelectric actuators; tunable photonic-bandgap microcavity waveguide; Biomembranes; Capacitive sensors; Microcavities; Optical design; Optical films; Optical modulation; Optical waveguides; Piezoelectric actuators; Piezoelectric films; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO '03. Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-748-2

Type

conf

Filename

1297774