DocumentCode
412124
Title
Thermo-optically tunable thin film components
Author
Domash, Lawrence H. ; Nemchuk, Nikolay ; Wu, Ming
Author_Institution
Aegis Semicond. Inc., Woburn, MA, USA
fYear
2003
fDate
6-6 June 2003
Abstract
Thermo-optically tunable thin film components have been developed based on amorphous semiconductors deposited by PECVD. Single cavity and multiple cavity structures are possible, with a wide variety of design possibilities exhibiting tunability not only in wavelength but also in transmission, bandwidth or chromatic dispersion.
Keywords
amorphous semiconductors; optical films; plasma CVD; thermo-optical devices; PECVD; amorphous semiconductor; bandwidth dispersion; chromatic dispersion; multiple cavity structure; single cavity structure; thermo-optically tunable thin film component; Amorphous semiconductors; Band pass filters; Fabry-Perot; Monitoring; Optical films; Optical filters; Piezoelectric films; Semiconductor films; Semiconductor thin films; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298273
Link To Document