DocumentCode
412178
Title
Imaging interferometric microscopy of two-dimensional structures
Author
Schwarz, C.J. ; Kuznetsova, Yuliya ; Brueck, S.R.J.
Author_Institution
Center for High Technol. Mater., Albuquerque, NM, USA
fYear
2003
fDate
6-6 June 2003
Abstract
We demonstrate the imaging of two-dimensional patterns by IIM and compare the results achieved with a low NA lens having a long working distance, a large-field-of-view and a long depth-of-field with a Fourier optics model and a conventional microscope image of a high NA lens.
Keywords
Fourier transform optics; lenses; light interferometry; optical images; optical microscopy; Fourier optics model; imaging interferometric microscopy; large-field-of-view; long depth-of-field; low NA lens; two-dimensional structures; Adaptive optics; Frequency; High-resolution imaging; Holographic optical components; Holography; Lenses; Lighting; Optical imaging; Optical interferometry; Optical microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298328
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