• DocumentCode
    412184
  • Title

    Standing-wave microsensor for adaptive analysis of spectral coherence

  • Author

    Bhalotra, S.R. ; Kung, H.L. ; Jiao, Y. ; Fu, J. ; Helman, N.C. ; Levi, O. ; Miller, D.A.B. ; Harris, J.S., Jr.

  • Author_Institution
    Edward L. Ginzton Lab. & Solid State Photonics Lab., Stanford Univ., CA, USA
  • fYear
    2003
  • fDate
    6-6 June 2003
  • Abstract
    We present an integrated microsensor for time-domain analysis of spectral coherence, with a tunable coherence detection range. The 0.2 cm/sup 3/ device includes a partially transmitting GaAs/AlGaAs photodiode and a large-displacement scanning Si MEMS mirror.
  • Keywords
    III-V semiconductors; aluminium compounds; gallium arsenide; light coherence; micromirrors; microsensors; optical tuning; photodiodes; silicon; spectral analysis; time-domain analysis; GaAs-AlGaAs; Si; adaptive time-domain analysis; large-displacement scanning Si MEMS mirror; photodiode; spectral coherence; standing-wave integrated microsensor; tunable coherence detection range; Coherence; Light emitting diodes; Micromechanical devices; Microsensors; Mirrors; Optical devices; Optical filters; Optical sensors; Photodetectors; Spectral analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO '03. Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    1-55752-748-2
  • Type

    conf

  • Filename
    1298334