Title :
New low temperature fetuto-second laser annealing method for TFT fabrication technology
Author :
Zaitsev, Alexei K. ; Wang, Yi-Chao ; Pan, Ci-Ling ; Shieh, Jia-Min
Author_Institution :
National Chiao Tung University
Keywords :
Annealing; Crystallization; Gas lasers; Optical device fabrication; Optical films; Silicon; Substrates; Temperature; Thin film transistors; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
