Nanolithography by enhanced laser irradiation

Author

Lu, Y.F.

Author_Institution

Dept. of Electr. Eng., Nebraska Univ., Lincoln, NE, USA

fYear

2003

fDate

6-6 June 2003

Abstract

A general model for the near-field optical intensity induced by a conductive tip under polarized laser irradiation is developed for the laser-assisted SPM. The calculations show that a 3:1 silver SPM tip can induce an optical field enhancement of 525 times on a gold substrate surface. Field enhancement and intensity profiles strongly depend on the tip-sample geometry, laser parameters and the dielectric properties of the tip and sample. The temperature rise was analyzed for the cases with and without tip-surface contact. Thermal expansion of the tip is calculated and compared with the tip-sample distance of an SPM junction to determine whether contact between the tip and sample surface occurred.

Keywords

conducting materials; dielectric properties; gold; laser beam effects; light polarisation; nanolithography; optical fabrication; scanning probe microscopy; silver; thermal expansion; Ag; Au; dielectric property; enhanced laser irradiation; gold substrate surface; intensity profile; laser parameters; laser-assisted SPM; nanolithography; nanoscale conductive tip; near-field optical intensity; optical field enhancement; polarized laser irradiation; thermal expansion calculation; tip-sample geometry; Dielectric substrates; Geometrical optics; Gold; Laser modes; Nanolithography; Optical polarization; Scanning probe microscopy; Silver; Temperature; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO '03. Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-748-2

Type

conf

Filename

1298619