F/sub 2/-laser micromachining of microfluidic channels and vias for biophotonic chip applications

Author

Herman, Peter R. ; Yick, Andrew ; Li, Jianzhao ; Munce, Nigel ; Lilge, Lothar ; Jervis, Eric ; Krylov, Sergey

Author_Institution

Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada

fYear

2003

fDate

6-6 June 2003

Abstract

Deep-ultraviolet F/sub 2/-laser radiation drives strong interactions in optically transparent glasses for smooth and crack-free shaping of microfluidic channels, microvias, and arrays for cell-on-a-chip applications. We describe cell manipulation and imaging applications in custom fabricated biophotonic chips.

Keywords

biomedical optical imaging; cellular biophysics; fluorine; gas lasers; laser beam effects; laser beam machining; micro-optics; microfluidics; optical fabrication; optical glass; transparency; F/sub 2/; F/sub 2/-laser micromachining; arrays; biophotonic chip applications; cell imaging applications; cell manipulation; cell-on-a-chip applications; crack-free shaping; deep-ultraviolet F/sub 2/-laser radiation; microfluidic channels; microvias; optically transparent glass; smooth shaping; Biological materials; Biomedical optical imaging; Biophotonics; Glass; Laser modes; Microfluidics; Micromachining; Optical materials; Optical mixing; Optical surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO '03. Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-748-2

Type

conf

Filename

1298621