Infinite dimension system approach for hybrid force/position control in micromanipulation

This paper aims at developing a force-guided micromanipulation technology with in-situ PVDF beam force sensing and hybrid force/position control based on an infinite dimensional system model. By using the designed PVDF force sensing cantilever composite structure with high sensitivity, the micro contact force/impact signal and its derivative can be extracted and processed. As the sensor structure installed at the end of micromanipulator is a soft beam, when manipulation is performed, the cantilever beam is necessary to be considered as a distributed parameter flexible link, then we developed a hybrid micro contact force/position control scheme on the basis of an infinite dimension system model. Experimental results verify the performance of the developed micro force sensing and hybrid control scheme. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.