DocumentCode
414463
Title
A new analytical inductance extraction technique of on-wafer spiral inductors
Author
Shima, Hideki ; Matsuoka, Toshimasa ; Taniguchi, Kenji
Author_Institution
Dept. of Electron. & Inf. Syst., Osaka Univ., Japan
fYear
2004
fDate
22-25 March 2004
Firstpage
279
Lastpage
283
Abstract
We derive a novel scalable self-inductance expression of interconnects connected to spiral inductors. With the use of the expression, the intrinsic inductance of spiral inductors can be extracted from measured results without any special fixtures. The accuracy of the proposed expression is proved by an electromagnetic simulator. In a comparison with the field solver, our calculated inductances match simulated results within 1.4%.
Keywords
computational electromagnetics; inductance measurement; inductors; integrated circuit interconnections; integrated circuit measurement; integrated circuit modelling; analytical inductance extraction technique; electromagnetic simulator; interconnects; intrinsic inductance; on-wafer spiral inductors; scalable self-inductance expression; Data mining; Fixtures; Inductance measurement; Inductors; Integrated circuit interconnections; Integrated circuit measurements; Magnetic analysis; Magnetic separation; Radiofrequency integrated circuits; Spirals;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2004. Proceedings. ICMTS '04. The International Conference on
Print_ISBN
0-7803-8262-5
Type
conf
DOI
10.1109/ICMTS.2004.1309495
Filename
1309495
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