• DocumentCode
    415629
  • Title

    Hole trapping effect on methodology for DC and AC negative bias temperature instability measurements in PMOS transistors

  • Author

    Huard, V. ; Denais, M.

  • Author_Institution
    Philips Semicond., Crolles, France
  • fYear
    2004
  • fDate
    25-29 April 2004
  • Firstpage
    40
  • Lastpage
    45
  • Abstract
    This works presents a thorough study of adequate methodology to be used in order to characterize the NBTI degradation by taking into account the transient effects. The hole trapping/detrapping effect on previously existent traps is the dominant origin of the transient effect and not the interface traps passivation by hydrogen atoms diffusing back to the interface.
  • Keywords
    MOSFET; hole traps; interface states; semiconductor device breakdown; semiconductor device reliability; AC negative bias temperature instability; DC negative bias temperature instability; PMOS transistors; hole trapping effect; hole trapping/detrapping effect; transient effects; Current measurement; Degradation; Density measurement; MOSFETs; Negative bias temperature instability; Niobium compounds; Stress measurement; Temperature measurement; Threshold voltage; Titanium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium Proceedings, 2004. 42nd Annual. 2004 IEEE International
  • Print_ISBN
    0-7803-8315-X
  • Type

    conf

  • DOI
    10.1109/RELPHY.2004.1315299
  • Filename
    1315299