DocumentCode
416237
Title
Optical proximity correction (OPC)-friendly maze routing
Author
Huang, Li-Da ; Wong, Martin D F
Author_Institution
Universitiof Texas at Austin, Texas
fYear
2004
fDate
7-11 July 2004
Firstpage
186
Lastpage
191
Keywords
Adaptive optics; Atmosphere; Costs; Lagrangian functions; Lithography; Manufacturing processes; Optical diffraction; Optical distortion; Photonic integrated circuits; Routing;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Automation Conference, 2004. Proceedings. 41st
Conference_Location
San Diego, CA, USA
ISSN
0738-100X
Print_ISBN
1-51183-828-8
Type
conf
Filename
1322468
Link To Document