DocumentCode

416260

Title

Phase correct routing for alternating phase shift masks

Author

McCullen, Kevin

Author_Institution

IBM Microelectronics Division, Essex Junction, VT

fYear

2004

fDate

7-11 July 2004

Firstpage

317

Lastpage

320

Keywords

Algorithm design and analysis; Apertures; Interference; Lithography; Microelectronics; Permission; Rivers; Routing; Shape; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Automation Conference, 2004. Proceedings. 41st

Conference_Location

San Diego, CA, USA

ISSN

0738-100X

Print_ISBN

1-51183-828-8

Type

conf

Filename

1322496