DocumentCode
416889
Title
Particle element and size measurement using LIBS
Author
Wakamatsu, Muneaki ; Ueda, Toshitugu ; Hayashi, Hisanori
Author_Institution
Yokogawa Electr. Corp., Tokyo, Japan
Volume
2
fYear
2003
fDate
4-6 Aug. 2003
Firstpage
1191
Abstract
Conventional particle size measurement are possible by calculations made from the average particle size. We have developed high-sensitivity-in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. The developed system can measure an average of 100 measurements and also individual phenomena. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes down to 30 nm and the constituent element content of particles with 10% accuracy.
Keywords
laser beam effects; measurement by laser beam; particle size measurement; statistical testing; 30 nm; high sensitivity in-situ measurement; laser induced breakdown spectroscopy; particle element measurement; particle size measurement; photon measurement; plasmatizing particles technology; statistical testing; ultraviolet wavelength bands; visible wavelength bands;
fLanguage
English
Publisher
ieee
Conference_Titel
SICE 2003 Annual Conference
Conference_Location
Fukui, Japan
Print_ISBN
0-7803-8352-4
Type
conf
Filename
1324132
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