Title :
Particle element and size measurement using LIBS
Author :
Wakamatsu, Muneaki ; Ueda, Toshitugu ; Hayashi, Hisanori
Author_Institution :
Yokogawa Electr. Corp., Tokyo, Japan
Abstract :
Conventional particle size measurement are possible by calculations made from the average particle size. We have developed high-sensitivity-in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. The developed system can measure an average of 100 measurements and also individual phenomena. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes down to 30 nm and the constituent element content of particles with 10% accuracy.
Keywords :
laser beam effects; measurement by laser beam; particle size measurement; statistical testing; 30 nm; high sensitivity in-situ measurement; laser induced breakdown spectroscopy; particle element measurement; particle size measurement; photon measurement; plasmatizing particles technology; statistical testing; ultraviolet wavelength bands; visible wavelength bands;
Conference_Titel :
SICE 2003 Annual Conference
Conference_Location :
Fukui, Japan
Print_ISBN :
0-7803-8352-4