• DocumentCode
    416889
  • Title

    Particle element and size measurement using LIBS

  • Author

    Wakamatsu, Muneaki ; Ueda, Toshitugu ; Hayashi, Hisanori

  • Author_Institution
    Yokogawa Electr. Corp., Tokyo, Japan
  • Volume
    2
  • fYear
    2003
  • fDate
    4-6 Aug. 2003
  • Firstpage
    1191
  • Abstract
    Conventional particle size measurement are possible by calculations made from the average particle size. We have developed high-sensitivity-in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. The developed system can measure an average of 100 measurements and also individual phenomena. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes down to 30 nm and the constituent element content of particles with 10% accuracy.
  • Keywords
    laser beam effects; measurement by laser beam; particle size measurement; statistical testing; 30 nm; high sensitivity in-situ measurement; laser induced breakdown spectroscopy; particle element measurement; particle size measurement; photon measurement; plasmatizing particles technology; statistical testing; ultraviolet wavelength bands; visible wavelength bands;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SICE 2003 Annual Conference
  • Conference_Location
    Fukui, Japan
  • Print_ISBN
    0-7803-8352-4
  • Type

    conf

  • Filename
    1324132