Ellipsometric imager using correlation image sensor and rotating polarizers

Ellipsometry is a widely used technique to characterize surface of thin films and materials. We propose a new method to obtain ellipsometric parameters in real-time and simultaneously as a pair of images. Our method consists of two components: a rotating polarizer and an analyzer, and a correlation image sensor for demodulation. We show a theoretical analysis of the system. We show several experimental results using the imaging system to observe spatial and time-varying distributions of ellipsometric parameters in real-time.