Emissivity measurement of silicon semiconductor wafer near room temperature

Emissivity behaviors of a silicon semiconductor wafer near room temperature have been measured and considered from the view point of spectral, directional and polarized properties. The silicon wafer near room temperature is semitransparent at a wavelength more than 1.1 /spl mu/m, which makes emissivity behaviors complicated. Modeling of emissivities is proposed and compared with experimental results.