Electro-thermal study of nano-inductors for integrated low power converters

This paper presents an approach on electro-thermal simulation problem for integrated inductors´ performances could be improved using sub-micronic dimensions. Indeed, component scale reduction allows higher working frequencies and brings better quality factor. More, higher inductance value can be achieved (around 1μH for this study) with lower surface consumption. Before realization, some information must be collected on the amount of energy this kind of inductor is able to treat and how nanowires fail. After a presentation of theoretical tools adapted to nanoscale simulation, 3D finite elements simulation tool is validated. First results on inductors are presented and commented. Structure modifications proposals are made taking account of electromigration and heat generation along the coil. The goal is to foresee weakness of the inductive structure in order to make them high-reliable components.