Efficient analysis of on-chip spiral inductor with high-order and trapezoidal rooftop basis function

The on-chip spiral inductor is a very important component in radio frequency (RF) IC design; however, its accurate analysis is not an easy task, especially when lossy substrate coupling is involved. We present an efficient full wave analysis for an on-chip spiral inductor with the following new techniques: a method of moments (MoM) based mixed potential integral equation (MPIE) is solved with the trapezoidal rooftop basis function; substrate coupling and layered medium effects are captured by the fast Green´s function; a Gaussian-quadrature scheme is used to deal with the current distribution singularity at the edge. The method´s efficiency and accuracy is demonstrated and good agreement between the method and other methods (include measurement) is achieved.