DocumentCode
41953
Title
Fabrication of Humidity Sensor Based on Bilayer Graphene
Author
Meng-Chu Chen ; Cheng-Liang Hsu ; Ting-Jen Hsueh
Author_Institution
Dept. of Appl. Sci., Nat. Taitung Univ., Taitung, Taiwan
Volume
35
Issue
5
fYear
2014
fDate
May-14
Firstpage
590
Lastpage
592
Abstract
Bilayer graphene was synthesized by chemical vapor deposition, for which the optical transmission is ~95%-96%. XPS detected that a few oxygen molecules were absorbed on the surface of graphene. The Raman and optical transmission spectra verified that the graphene sample is bilayer. The responses of the bilayer graphene sample increased with increased relative humidity.
Keywords
Raman spectra; X-ray photoelectron spectra; chemical vapour deposition; graphene; humidity sensors; visible spectra; C; Raman spectra; XPS; bilayer graphene; chemical vapor deposition; humidity sensor; optical transmission spectra; oxygen molecules; Carbon; Copper; Graphene; Humidity; Optical sensors; Substrates; Temperature measurement; Graphene; bilayer; humidity; sensor; sensor.;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2014.2310741
Filename
6775252
Link To Document