Title :
A novel MEMS LTCC switch matrix
Author :
Yassini, Bahram ; Choi, Savio ; Zybura, Andre ; Yu, Ming ; Mihailovich, Robert E. ; DeNatale, Jeffrey F.
Author_Institution :
COMDEV Ltd., Canada
Abstract :
A novel planar 4×4 switch matrix using microelectromechanical system (MEMS) switches and low temperature cofired ceramic (LTCC) substrate is presented for the first time. Together a 9-layer LTCC substrate and 32 MEMS switches are integrated to create a non-blocking 4×4 switch matrix functionality with excellent RF performance up to 7 GHz. An accurate model for predicting the interconnect circuit and switch matrix RF performance up to 20 GHz is also presented.
Keywords :
coplanar waveguides; microswitches; microwave switches; CPW; LTCC substrate; MEMS switch; RF performance; coplanar waveguide; low temperature cofired ceramics; microelectromechanical system; radiofrequency switches; switch matrix functionality; Ceramics; Integrated circuit interconnections; Microelectromechanical systems; Micromechanical devices; Microswitches; Predictive models; Radio frequency; Switches; Temperature; Transmission line matrix methods;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1339060
