DocumentCode
421503
Title
Direct synthesis of germanium sulphide glass planar waveguides by chemical vapour deposition (CVD)
Author
Huang, C.-C. ; Hewak, D.W. ; Badding, J.V.
Author_Institution
Optoelectron. Res. Centre, Southampton Univ., UK
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
Germanium sulphide glass has been deposited on CaF/sub 2/ and Schott N-PSK58 glass substrates directly by chemical vapour deposition (CVD). The CVD process has shown the high potential for germanium sulphide glass planar waveguides fabrication.
Keywords
chalcogenide glasses; chemical vapour deposition; germanium compounds; optical fabrication; optical planar waveguides; semiconductor growth; CaF/sub 2/; GeS; Schott N-PSK58 glass substrates; SiO/sub 2/; chemical vapour deposition; direct synthesis; germanium sulphide glass; planar waveguides; waveguides fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360695
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