DocumentCode
421504
Title
As-grown low-loss germanosilicate layers by PECVD
Author
Ay, Feridun ; Aydinli, Atilla ; Agan, Sedat
Author_Institution
Dept. of Phys., Bilkent Univ., Ankara, Turkey
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.
Keywords
Fourier transform spectra; germanate glasses; hydrogen bonds; infrared spectra; optical losses; optical planar waveguides; plasma CVD coatings; Fourier transform infrared spectroscopy; GeO/sub 2/SiO/sub 2/; N-H bond concentration; PECVD; as-grown germanosilicate layers; germane; germanosilicate planar waveguides; low-loss germanosilicate layers; propagation loss;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360696
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