DocumentCode
422130
Title
Nanomotion measurement by phase conjugate interferometry
Author
Kurtz, RM ; Pradhan, R.D. ; Aye, T.M. ; Savant, G.D. ; Klein, M.V.
Author_Institution
Electro-Optics & Holography Div., Phys. Opt. Corp., Torrance, CA, USA
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
A new interferometer design for measuring nanometer-level motion is presented. Experiments show that this new design enables motion measurement at much longer distances than the current state of the art with no loss in accuracy.
Keywords
light interferometry; motion measurement; optical design techniques; optical phase conjugation; nanomotion measurement; phase conjugate interferometry;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361597
Link To Document