DocumentCode
422131
Title
Interferometric displacement measurement by use of time-shared two-wavelength laser diode
Author
Suzuki, T. ; Mitomi, M. ; Sasaki, O.
Author_Institution
Fac. of Eng., Niigata Univ., Japan
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred /spl mu/m and resolution to within /spl sim/3 /spl mu/m, respectively.
Keywords
displacement measurement; light interferometry; measurement by laser beam; optical sensors; semiconductor lasers; displacement sensor; interferometric displacement measurement; time-shared two-wavelength laser diode; two-wavelength interferometry;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361598
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