DocumentCode
422231
Title
Novel holographic masking technique for Bragg reflector inscription on integrated optics components
Author
Ferriere, Richard ; Dudley, John M. ; Benkelfat, Badr-Eddine
Author_Institution
Lab. d´´Optique, Univ. de Franche-Comte, Besancon, France
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
A novel triangular interferometer configuration is used to inscribe periodic or aperiodic patterns with micronic or submicronic fringe spacing. It is employed to realize Bragg reflectors or resonant grating filters on integrated optical components.
Keywords
Bragg gratings; holographic interferometry; integrated optics; masks; optical filters; photoresists; Bragg reflector inscription; aperiodic pattern inscription; fringe spacing; holographic masking; integrated optics components; periodic pattern inscription; resonant grating filters; triangular interferometer configuration;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361700
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