DocumentCode
422281
Title
1.5-/spl mu/m-wavelength single mode semiconductor lasers with deeply etched vertical grating
Author
Arai, S. ; Kim, H.-C. ; Kanjo, H.
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
Small periodic grating structures were dry-etched with superior vertically and high aspect ratio. These structures were then applied to demonstrate stable single mode and low threshold operation on high index contrast laser devices.
Keywords
diffraction gratings; etching; laser modes; laser stability; laser transitions; semiconductor lasers; 1.5 mum; deeply etched vertical grating; dry etching; periodic grating structures; single mode semiconductor lasers; stable single mode;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361755
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