Inversion-based precision-positioning of switching inertial reaction devices

Inertial reaction devices enable nano/micro resolution positioning over macroscopic ranges. Such positioning devices are characterized by the displacement of a mass by utilizing stick-slip phenomena between the mass and the device´s actuators. The displacement of the actuator (i.e., the driving waveform) is chosen such that the mass sticks to the actuator and is displaced with the actuator during the first tracking phase, and the mass slips over the actuator during the second retrace phase such that the position of the actuator is reset. However, as the frequency of the driving waveform is increased, vibrations are induced in the actuators, preventing precise actuator positioning and thereby, limiting the maximum achievable operating speed. In this paper, we employ an inversion-based method to allow the actuators to track high-frequency driving waveforms without exciting the vibrations, therefore achieving high-speed operation of the inertial reaction device. Experimental results on a one-degree-of freedom inertial reaction rotational device showed that the operating speed could be substantially increased (more than doubled) by using the proposed method.