A low-cost vertical comb-drive approach to low voltage and fast response RF-MEMS switches

This paper presents the novel approach to low voltage actuation, high speed response and thermally stable performances in RF-MEMS switches. The switches, which comprise of combdrive electrodes, are actuated entirely by the electrostatic forces applied not only for the on-state but also the off-state. The structures were fabricated using a simple low-cost four-mask process with 0.7 pm thick movable membranes achieved using sputtered aluminum. The characteristics of switching speed response / actuation voltage for on- and off-state are 4.9 μs / 5 V and 16.7 μs / 5 V, respectively. The guaranteed performance achieved using the comb-drive actuation is described at temperature of 50°C.