DocumentCode
430618
Title
A thermally driven tunable TFBAR bandpass filter
Author
Hong-Teuk Kim ; Heon-Min Lee ; Hyung-Kyu Choi ; Jae-Young Park ; Jong-Uk Bu ; Kyungho Lee
Volume
1
fYear
2004
fDate
12-14 Oct. 2004
Firstpage
491
Lastpage
494
Abstract
A tunable handpass filter based on TFBARs bas been realized by micro-machined thin film AIN devices. For tuning the center frequency, a MO micro heating Line is integrated with TFBARs. As applying the de voltage from 0 to 11.6 V to the resistive heating Line, the center frequency of a PCS band TFBAR filter with a bandwidth of 60 MHz is varied from 1.779 to 1.762 GHz (17 MHz shift).
Keywords
Band pass filters; Electrodes; Fabrication; Film bulk acoustic resonators; Heating; Personal communication networks; Radio frequency; Resonator filters; Sputtering; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1412636
Link To Document