• DocumentCode
    430618
  • Title

    A thermally driven tunable TFBAR bandpass filter

  • Author

    Hong-Teuk Kim ; Heon-Min Lee ; Hyung-Kyu Choi ; Jae-Young Park ; Jong-Uk Bu ; Kyungho Lee

  • Volume
    1
  • fYear
    2004
  • fDate
    12-14 Oct. 2004
  • Firstpage
    491
  • Lastpage
    494
  • Abstract
    A tunable handpass filter based on TFBARs bas been realized by micro-machined thin film AIN devices. For tuning the center frequency, a MO micro heating Line is integrated with TFBARs. As applying the de voltage from 0 to 11.6 V to the resistive heating Line, the center frequency of a PCS band TFBAR filter with a bandwidth of 60 MHz is varied from 1.779 to 1.762 GHz (17 MHz shift).
  • Keywords
    Band pass filters; Electrodes; Fabrication; Film bulk acoustic resonators; Heating; Personal communication networks; Radio frequency; Resonator filters; Sputtering; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2004. 34th European
  • Conference_Location
    Amsterdam, The Netherlands
  • Print_ISBN
    1-58053-992-0
  • Type

    conf

  • Filename
    1412636