Title :
A novel piezoelectric interdigital transducer for the excitation of high frequency surface acoustic waves
Author :
Daniau, W. ; Kumar, A. K Sarin ; Paruch, P. ; Marré, D. ; Triscone, J.M. ; Ballandras, S.
Author_Institution :
Inst. FEMTO-ST, Besancon, France
Abstract :
We propose a novel piezoelectric interdigital transducer (PIT) based on alternately poled domains of a ferroelectric thin film deposited on top of a single crystal substrate. This transducer offers an alternative to the interdigital transducer (IDT) for the excitation of very high frequency surface acoustic waves (SAW). An experimental validation of the approach is reported in a 1-4 GHz frequency range, confirming theoretical predictions.
Keywords :
ferroelectric thin films; interdigital transducers; substrates; surface acoustic wave transducers; 1 to 4 GHz; alternately poled domains; ferroelectric thin film; high frequency surface acoustic waves; piezoelectric interdigital transducer; piezoelectric transducer; single crystal substrate; Acoustic transducers; Acoustic waves; Atomic force microscopy; Ferroelectric materials; Frequency; Piezoelectric films; Piezoelectric transducers; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1417757
