Title :
Lead-free thick piezoelectric films as miniature high temperature ultrasonic transducers
Author :
Kobayashi, M. ; Jen, C.K. ; Ono, Y. ; Krüger, S.
Author_Institution :
Dept. of ECE, McGill Univ., Montreal, Que., Canada
Abstract :
Thick piezoelectric lead-free bismuth titanate films have been successfully deposited on steel substrates with different shapes by a sol-gel spray technique. The center frequencies of ultrasonic signals generated by the bismuth titanate films on steel samples ranged from 5 to 30 MHz and their bandwidth was broad. The ultrasonic signals generated and received by these ultrasonic transducers had a signal-to-noise ratio of 25 dB at 200°C in pulse/echo mode. This transducer can be as small as 1 mm in diameter.
Keywords :
bismuth compounds; piezoelectric thin films; sol-gel processing; steel; substrates; thin film devices; ultrasonic transducers; 1 mm; 200 C; 5 to 30 MHz; BiTiO3; high temperature ultrasonic transducers; lead-free bismuth titanate films; miniature ultrasonic transducers; pulse/echo mode; signal-to-noise ratio; sol-gel spray technique; steel substrates; thick piezoelectric films; ultrasonic signals; Bismuth; Environmentally friendly manufacturing techniques; Piezoelectric films; Shape; Signal generators; Spraying; Steel; Temperature; Titanium compounds; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1417883