Micromachined split-block Schottky-diode mixer for 600 GHz

Author

Schur, J. ; Biber, S. ; Gumbmann, F. ; Mottet, B. ; Cojocari, O. ; Schmidt, L.P. ; Hartnagel, H.L.

Author_Institution

Inst. for Microwave Technol., Erlangen-Nurnberg Univ., Erlangen, Germany

fYear

2004

fDate

27 Sept.-1 Oct. 2004

Firstpage

325

Lastpage

326

Abstract

This paper presents simulation results for a 600 GHz micromachined waveguide mixer with integrated horn antenna, a hybrid-integrated planar Schottky diode and IF filter structures on a quartz substrate. In addition to the simulated electrical performance we show approaches for the manufacturing of the split-block mixer by both micro-mechanical milling and silicon etching technology.

Keywords

Schottky diode mixers; antenna theory; elemental semiconductors; etching; horn antennas; low-pass filters; micromachining; micromechanical devices; microstrip antennas; microstrip transitions; silicon; submillimetre wave mixers; waveguide theory; 600 GHz; IF filter structures; Si-SiO₂; hybrid integrated planar Schottky diode; integrated horn antenna; micromachined waveguide mixer; micromechanical milling; quartz substrate; silicon etching technology; simulated electrical performance; split block Schottky diode mixer; Antenna measurements; Dry etching; Frequency; Horn antennas; Microstrip; Planar waveguides; Schottky diodes; Silicon; Waveguide transitions; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on

Print_ISBN

0-7803-8490-3

Type

conf

DOI

10.1109/ICIMW.2004.1422090

Filename

1422090