Finite-element model of the tensoresistor

Classifications of integrated tensoresistor models are presented, These models are including: anisotropy of conductivity; influence of tensoresistor geometry and contact areas; non-Uniform distribution of mechanical stress and concentration of doping impurity on tensoresistor volume. The finite-elernent model integrated tensoresistor which allows taking into account in consecutive these effects is submitted. The received model can be used for calculation and optimization multiterminal strain-sensing element with complex layout.