MIMO integral-action anti-windup controller design and applications to temperature control in RTP systems

Author

Mete, A.N. ; Gunde, A.N.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA

Volume

3

fYear

2004

fDate

14-17 Dec. 2004

Firstpage

2590

Abstract

An integral-action controller synthesis is presented, where the controller achieves closed-loop stability and zero steady-state error due to step-input references. Closed-loop stability is maintained even when the integrators in all of the controller channels are limited or completely switched off to protect against integrator windup. The proposed method is applied to temperature control in rapid thermal processing systems, where critical requirements are imposed on tracking of temperature profiles.

Keywords

MIMO systems; closed loop systems; control nonlinearities; control system synthesis; stability; temperature control; MIMO integral-action anti-windup controller design; closed-loop stability; integrator windup; rapid thermal processing systems; step-input references; temperature control; temperature profile tracking; zero steady-state error; Control system synthesis; Control systems; Error correction; MIMO; Protection; Rapid thermal processing; Stability; Steady-state; Temperature control; Windup;

fLanguage

English

Publisher

ieee

Conference_Titel

Decision and Control, 2004. CDC. 43rd IEEE Conference on

ISSN

0191-2216

Print_ISBN

0-7803-8682-5

Type

conf

DOI

10.1109/CDC.2004.1428848

Filename

1428848