• DocumentCode
    435795
  • Title

    Finite element stress analysis of an multi-chip package by Taguchi design of experiments for package component thicknesses

  • Author

    Liu, Biao ; Wang, Mingxiang ; Lam, Tim Fai

  • Author_Institution
    Dept. of Microelectron., Soochow Univ., China
  • Volume
    1
  • fYear
    2004
  • fDate
    18-21 Oct. 2004
  • Firstpage
    611
  • Abstract
    Slacked multi-chip package (MCP) has been an increasingly important approach for realizing high-density 3D packaging. To accommodate multiple chips within a standard package height with adequate integrity and reliability puts stringent demands on wafer thinning technology, as well as on assembly process technology. In this work, internal stress distribution and package warpage in MCP originated from process thermal load have been systematically investigated as functions of all structure parameters by finite element analysis (FEA) and Taguchi design of experiments (DOE). It is found that top die is the easiest to crack under thermal stress. The maximum stress in this die can be effectively relieved by increasing its thickness and/or by decreasing the thickness of die attach underneath. Shear stress at each interface depends negatively on the corresponding die attach thickness, while top-surface warpage can be controlled by mould compound thickness above top die.
  • Keywords
    Taguchi methods; design of experiments; finite element analysis; internal stresses; multichip modules; stress analysis; thermal stress cracking; Taguchi design of experiments; assembly process technology; die attach thickness; finite element analysis; high-density 3D packaging; internal stress distribution; mould compound thickness; package component thickness; package warpage; process thermal load; shear stress; slacked multichip package; stress analysis; thermal stress; top-surface warpage; wafer thinning technology; Assembly; Finite element methods; Internal stresses; Microassembly; Packaging; Stress control; Thermal loading; Thermal stresses; Thickness control; US Department of Energy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
  • Print_ISBN
    0-7803-8511-X
  • Type

    conf

  • DOI
    10.1109/ICSICT.2004.1435080
  • Filename
    1435080