Title :
Influence of adsorption-desorption on resonant frequency of micro- and nanocantilevers
Author :
Ping, Wang ; Huang, Qing-An ; Hong, Yu
Author_Institution :
Key Lab. of MEMS, Southeast Univ., Nanjing, China
Abstract :
When MEMS is scaled down to nanometers, the surface effects become more and more obvious, among which the influence of adsorption is a main aspect. The paper deals with the problem of the influence of adsorption on resonators in NEMS, based on three basics of adsorption theory. It shows that the change of frequency induced by the adsorption increases with the decrease of cantilever dimensions.
Keywords :
adsorption; desorption; micromechanical resonators; nanotechnology; MEMS; adsorption influence; adsorption-desorption; microcantilevers; nanocantilevers; resonant frequency; resonators; surface effects; Electrical capacitance tomography; Equations; Gases; Laboratories; Micromechanical devices; Nanoelectromechanical systems; Nonhomogeneous media; Resonant frequency; Solids; Temperature;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435172
