Study of a novel PZT thin films based micromachined ultrasonic transducer for distance measurement

Author

Yi Yang ; Tian-Ling Ren ; Yi-Ping Zhu

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

Volume

3

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

1788

Abstract

Piezoelectric micromachined ultrasonic transducers (pMUTs) based on PZT-coated membrane structures have been fabricated, packaged and tested. Performance prediction for the resonance frequency is given. Mechanical quality factor, voltage response and directional polar response for the devices have been tested. Due to their small size and low cost, these pMUTs are extraordinary promising in distance measurement, especially used for many miniature measurement systems.

Keywords

circuit resonance; distance measurement; membranes; micromachining; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; PZT; PZT thin films; PZT-coated membrane structures; PbZrO3TiO3; directional polar response; distance measurement; mechanical quality factor; micromachined ultrasonic transducer; miniature measurement systems; pMUT; piezoelectric transducers; resonance frequency; voltage response; Biomembranes; Distance measurement; Packaging; Piezoelectric films; Q factor; Resonance; Resonant frequency; Testing; Transistors; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1435180

Filename

1435180