DocumentCode
435843
Title
Measurement technique of in-plane motion for MEMS based on block matching
Author
Jin, Cuiyun ; Li, Dachao ; Jin, Shijiu ; Feng, Yalin ; Hao, Yilong ; Zhang, Dacheng
Author_Institution
Precision Meas. Technol. & Instrum., Tianjin Univ., China
Volume
3
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
1904
Abstract
In order to measure motion characteristics and dynamic parameters of a MEMS resonator at every moment, by using stroboscopic imaging techniques, clear motion images for every moment in one cycle are obtained. Using the technique of block matching to process motion images of a MEMS resonator, the dynamic parameters are obtained. The results give important reference to MEMS design. Experimental results indicate that the repeatability of measurement is 40 nm.
Keywords
image matching; image motion analysis; micromechanical resonators; motion measurement; MEMS design; MEMS in-plane motion measurement technique; MEMS resonator dynamic parameters measurement; block matching; motion images; stroboscopic imaging techniques; Charge coupled devices; Frequency measurement; Measurement techniques; Microelectromechanical devices; Microelectronics; Micromechanical devices; Motion analysis; Motion estimation; Motion measurement; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1435209
Filename
1435209
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