• DocumentCode
    435844
  • Title

    A practical package technique for FBG-based temperature independent sensor

  • Author

    Tian, Keke ; Liu, Yuliang ; Wang, Qiming

  • Author_Institution
    Inst. of Semicond., Acad. Sinica, Beijing, China
  • Volume
    3
  • fYear
    2004
  • fDate
    18-21 Oct. 2004
  • Firstpage
    1908
  • Abstract
    A practical packaging technique for a temperature independent Fiber Bragg grating sensor is proposed. A uniform strength cantilever with two FBG attached on the upper and lower surfaces is utilized as the key element. By detecting the differential output of two wavelengths, the applied force can be obtained and temperature effects can be eliminated. Experimental results show that the sensor has a linear response and the output signal fluctuates less than 12 pm as the temperature changes from -10°C to 50°C. The maximum thermal error is less than 0.3% of the full measurement range.
  • Keywords
    Bragg gratings; fibre optic sensors; packaging; strain sensors; -10 to 50 C; applied force; differential output; linear response; packaging technique; strain transducer; temperature effects; temperature independent FBG sensor; temperature independent Fiber Bragg grating sensor; thermal error; uniform strength cantilever; wavelength shift; Bragg gratings; Capacitive sensors; Fiber gratings; Semiconductor device packaging; Silicon compounds; Strain measurement; Structural beams; Temperature sensors; Tensile strain; Thermal resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
  • Print_ISBN
    0-7803-8511-X
  • Type

    conf

  • DOI
    10.1109/ICSICT.2004.1435210
  • Filename
    1435210