DocumentCode
435844
Title
A practical package technique for FBG-based temperature independent sensor
Author
Tian, Keke ; Liu, Yuliang ; Wang, Qiming
Author_Institution
Inst. of Semicond., Acad. Sinica, Beijing, China
Volume
3
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
1908
Abstract
A practical packaging technique for a temperature independent Fiber Bragg grating sensor is proposed. A uniform strength cantilever with two FBG attached on the upper and lower surfaces is utilized as the key element. By detecting the differential output of two wavelengths, the applied force can be obtained and temperature effects can be eliminated. Experimental results show that the sensor has a linear response and the output signal fluctuates less than 12 pm as the temperature changes from -10°C to 50°C. The maximum thermal error is less than 0.3% of the full measurement range.
Keywords
Bragg gratings; fibre optic sensors; packaging; strain sensors; -10 to 50 C; applied force; differential output; linear response; packaging technique; strain transducer; temperature effects; temperature independent FBG sensor; temperature independent Fiber Bragg grating sensor; thermal error; uniform strength cantilever; wavelength shift; Bragg gratings; Capacitive sensors; Fiber gratings; Semiconductor device packaging; Silicon compounds; Strain measurement; Structural beams; Temperature sensors; Tensile strain; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1435210
Filename
1435210
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