• DocumentCode
    436798
  • Title

    In-situ scanning tunneling microscopy observation of InAs quantum dots on GaAs(001) during molecular beam epitaxy growth

  • Author

    Tsukamoto, Shiro ; Bell, Gavin R. ; Arakawa, Yasuhiko

  • Author_Institution
    Nanoelectronics Collaborative Res. Center, Tokyo Univ., Japan
  • fYear
    2004
  • fDate
    31 May-4 June 2004
  • Firstpage
    68
  • Lastpage
    73
  • Abstract
    Scanning tunneling microscopy (STM) has proved to be an invaluable tool for probing epitaxial growth phenomena in general, and has been successfully applied to many GaAs-based materials grown by molecular beam epitaxy (MBE). Typical STM-MBE experiments involve quenching the sample and transferring it to a remote STM chamber under arsenic-free ultra-high vacuum (UHV). In the case of GaAs-based materials grown at substrate temperatures of 400-600 °C, operating the STM at room temperature ensures that the surface is essentially static on the time scale of STM imaging. To attempt dynamic experiments requires a system in which STM and MBE were incorporated into one unit rather than in separate chambers in order to scan in situ during growth. In this paper, we discussed the observation on the heteroepitaxial growth of InAs on GaAs(001) by this system along with prospects for key in situ STM experiments.
  • Keywords
    III-V semiconductors; indium compounds; molecular beam epitaxial growth; quenching (thermal); scanning tunnelling microscopy; semiconductor growth; semiconductor quantum dots; 400 to 600 degC; InAs-GaAs; MBE; STM; arsenic-free ultra-high vacuum; epitaxial growth phenomena; heteroepitaxial growth; molecular beam epitaxy growth; quantum dots; quenching; scanning tunneling microscopy; Gallium arsenide; Image reconstruction; Microscopy; Molecular beam epitaxial growth; Quantum dots; Surface morphology; Surface reconstruction; Temperature; Tunneling; US Department of Transportation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 2004. 16th IPRM. 2004 International Conference on
  • ISSN
    1092-8669
  • Print_ISBN
    0-7803-8595-0
  • Type

    conf

  • DOI
    10.1109/ICIPRM.2004.1442613
  • Filename
    1442613