DocumentCode :
437186
Title :
IEE Seminar and Exhibition on MEMS and Sensor Technologies
fYear :
2005
fDate :
38467
Keywords :
biosensors; capacitive sensors; gyroscopes; infrared detectors; microsensors; biosensors; capacitive sensors; gyroscopes; infrared detectors; micromechanical devices; microsensors;
fLanguage :
English
Publisher :
iet
Conference_Titel :
MEMS Sensor Technologies, 2005. The IEE Seminar and Exhibition on
Conference_Location :
IET
ISSN :
0537-9989
Print_ISBN :
0-86341-523-7
Type :
conf
Filename :
1453342
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=437186
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