DocumentCode
437186
Title
IEE Seminar and Exhibition on MEMS and Sensor Technologies
fYear
2005
fDate
38467
Keywords
biosensors; capacitive sensors; gyroscopes; infrared detectors; microsensors; biosensors; capacitive sensors; gyroscopes; infrared detectors; micromechanical devices; microsensors;
fLanguage
English
Publisher
iet
Conference_Titel
MEMS Sensor Technologies, 2005. The IEE Seminar and Exhibition on
Conference_Location
IET
ISSN
0537-9989
Print_ISBN
0-86341-523-7
Type
conf
Filename
1453342
Link To Document