Title :
Determining the strength of micro-beams without measuring forces or displacements
Author :
Elata, David ; Hirshberg, Amon ; Naftali, Matan
Author_Institution :
Technion, Israel Inst. of Technol., Haifa, Israel
fDate :
30 Jan.-3 Feb. 2005
Abstract :
It is demonstrated that the strength of brittle micro-beams can be measured without measuring any forces or displacements. A novel test device is presented in which the strength of brittle beams is directly deduced from their size after failure.
Keywords :
beams (structures); failure (mechanical); mechanical strength; mechanical testing; micromechanical devices; test equipment; brittle micro beams; micro-beam strength; Conductors; Current measurement; Displacement measurement; Force measurement; Ligaments; Mechanical factors; Microelectromechanical devices; Stress; Surface texture; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453960
