DocumentCode

437320

Title

Focus & dose measurement method in volume production

Author

Ina, Hideki ; Oishi, Satoru ; Sentoku, Koichi

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

82

Lastpage

83

Keywords

Estimation error; Focusing; Libraries; Navigation; Production; Resists; Surfaces; Testing; Time measurement; Volume measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

conf

DOI

10.1109/IMNC.2004.245733

Filename

1459483