Title :
Development of the optical component for EUV phase-shift microscopes
Author :
Hosokawa, N. ; Tsutomu, N. ; Hamamoto, Kiichi ; Kinoshita, Hiroyuki
Keywords :
Laboratories; Lithography; Mirrors; Nonhomogeneous media; Optical devices; Optical microscopy; Reflectivity; Research and development; Transistors; Ultraviolet sources;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245739
