• DocumentCode
    437322
  • Title

    Proposal of large exposure area and wide dimensional X-ray lithography for liga process using energy variable synchrotron radiation

  • Author

    Utsumi, Yuichi ; Kishimoto, Takefumi ; Hattori, Tadashi ; Hara, Hirotsugu

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    104
  • Lastpage
    105
  • Keywords
    Fabrication; Microstructure; Proposals; Resists; Shape; Storage rings; Strontium; Substrates; Synchrotron radiation; X-ray lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245745
  • Filename
    1459495
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=437322