• DocumentCode
    437340
  • Title

    Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures

  • Author

    Sato, Hironobu ; Houshi, Yoshitaka ; Otsuka, Toshlharu ; Shoji, Shuichi

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    304
  • Lastpage
    305
  • Keywords
    Chromium; Electrodes; Fabrication; Glass; Gold; Lithography; Microchannel; Micromechanical devices; Resists; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245664
  • Filename
    1459598
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=437340