Development of 3D-LIGA process to fabricate spiral microcoil

Author

Mekaru, Harutaka ; Kusumi, Shinji ; Sato, Nobuyoshi ; Shimizu, Maiko ; Yamashita, Michiru ; Shimada, Osamu ; Hattori, Tadashi

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

330

Lastpage

331

Keywords

Chemicals; Coils; Copper; Injection molding; Nickel; Production; Resins; Spirals; Temperature; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245630

Filename

1459611

Link To Document