DocumentCode
438228
Title
High magnetization ferromagnetic spiral inductors using shape anisotropy
Author
Couderc, S. ; Viala, B. ; Royet, A.S. ; Ancey, P. ; Bouche, G.
Author_Institution
STMicroelectronics, France
fYear
2005
fDate
4-8 April 2005
Firstpage
553
Lastpage
554
Abstract
The main issue for 100% amplification with spirals using single deposition step process has been successfully achieved in this paper, with the use of high magnetization feHfN film as a core material. This allows combining shape anisotropy, solid magnetic plane design, high permeability and high FMR, being thought the most efficient and low cost solution for inductance enhancement and scaling down inductor dimensions.
Keywords
ferromagnetic materials; ferromagnetic resonance; inductors; magnetic anisotropy; magnetic thin films; core material; ferromagnetic resonance; high magnetization ferromagnetic spiral inductors; high permeability; inductance enhancement; shape anisotropy; single deposition step process; solid magnetic plane design; Anisotropic magnetoresistance; Inductors; Magnetic anisotropy; Magnetic cores; Magnetic films; Magnetic materials; Magnetization; Shape; Solids; Spirals;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN
0-7803-9009-1
Type
conf
DOI
10.1109/INTMAG.2005.1463705
Filename
1463705
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