A high resolution electron imaging integrated circuit

This paper reports the development of a new kind of two dimensional high resolution electron imaging integrated circuit. It is used in conjunction with Microchannel Plate electron multiplier arrays for image amplification. The High-resolution Electron Detector Array IC (HEDAIC) consists of a two dimensional array of 256 × 256 nMOS charge sensing circuits, each covered by its own 20µm × 20µm aluminium electrode on the IC surface. These electrodes are used to collect the electron charge from the MCP channel outputs. The sensors are arranged and accessed in a RAM like manner, and can be configured to generate either an analogue or digital output.